Эпитаксиальные пленки CaF2 и SrF2: химическое осаждение из газовой фазы, текстурно-морфологические особенности и гетероструктуры с их участием
Диссертация
К настоящему времени разработано несколько концепций технологии длинномерных ВТСП-материалов, в которых сверхпроводник представляет собой тонкослойное эпитаксиальное покрытие на гибкой металлической подложке (т.н. ВТСП материалы 2-го поколения). Эти материалы доказали свою применимость и высокую эффективность для передачи электроэнергии, создания моторов, генераторов и другого сверхпроводящего… Читать ещё >
Содержание
- Введение
- 2. Обзор литературы
- 2. 1. Кабели ВТСП второго поколения
- 2. 1. 1. Структура кабелей
- 2. 1. 2. ВТСП слой
- 2. 1. 3. Металлические подложки
- 2. 1. 4. Буферный слой
- 2. 1. 4. 1. Буферный слой — технологии 1ВАШ8Б и 11АВГГ
- 2. 1. 4. 2. Материалы буферного слоя
- 2. 1. Кабели ВТСП второго поколения
- 2. 2. Фториды ЩЗМ
- 2. 2. 1. Структура
- 2. 2. 2. Дефекты структуры флюорита
- 2. 2. 3. Оптические свойства
- 2. 2. 3. 1. Пропускание/поглощение
- 2. 2. 3. 2. Преломление
- 2. 2. 3. 3. Люминесцентные свойства
- 2. 2. 4. Электронная/ионная проводимость
- 2. 2. 5. Химические свойства
- 2. 2. 6. Практическое применение фторидов ЩЗМ
- 2. 2. 6. 1. Химические сенсоры
- 2. 2. 6. 2. Буферные слои
- 2. 3. 1. Физические методы получения пленок
- 2. 3. 1. 1. Молекулярно-лучевая эпитаксия
- 2. 3. 1. 2. Импульсное лазерное осаждение
- 2. 3. 1. 3. Термическое испарение
- 2. 3. 1. 4. Электронно-лучевое испарение
- 2. 3. 1. 5. Распылительное осаждение
- 2. 3. 2. Химические методы получения пленок
- 2. 3. 2. 1. Растворные методы
- 2. 3. 2. 2. Спрей-пиролиз
- 2. 3. 2. 3. Химическое осаждение из паровой фазы (Chemical Vapor Deposition,
- 3. 1. Использованные подложки
- 3. 2. Исходные вещества
- 3. 3. Осаждение пленок
- 3. 3. 1. Установка MOCVD
- 3. 3. 2. Условия осаждения
- 3. 3. 3. Многослойные пленки
- 3. 3. 4. Пленки ВТСП
- 3. 4. Отжиги пленок
- 3. 5. Методы анализа пленок
- 3. 5. 1. Рентгеновская дифракция
- 3. 5. 2. Сканирующая электронная микроскопия (СЭМ)
- 3. 5. 3. Спектроскопия резерфордовского обратного рассеяния (POP)
- 3. 5. 4. Рентгеноспектральный микроанализ (РСМА)
- 3. 5. 5. Атомно-силовая микроскопия (АСМ)
- 3. 5. 6. Дифракция обратно отраженных электронов (ДОЭ)
- 3. 5. 7. Свойства ВТСП
- 3. 5. 8. Оптическая микроскопия
- 4. 1. Кинетика осаждения
- 4. 2. Состав и толщина пленок
- 4. 3. Ориентация пленок
- 4. 3. 1. Пленки на г-сапфире
- 4. 3. 1. 1. Пленки CaF2 на г-сапфире
- 4. 3. 1. 2. Пленки Srp2 на г-сапфире
- 4. 3. 2. Пленки на MgO и Ni-W
- 4. 3. 3. Эффект атмосферы отжига
- 4. 3. 4. Эффект толщины пленок
- 4. 3. 1. Пленки на г-сапфире
- 4. 4. Поверхность пленок
- 4. 4. 1. Морфология поверхности пленок МРг
- 4. 4. 1. 1. Пленки с (111) ориентацией
- 4. 4. 1. 2. Пленки с (001) ориентацией
- 4. 4. 2. Текстура поверхности пленок
- 4. 4. 1. Морфология поверхности пленок МРг
- 4. 5. Проверка взаимодействия ВТСП с фторидами ЩЗМ в порошковых смесях
- 4. 6. Сверхпроводящие свойства структур YBCO/IVHVNi-W
- 4. 7. Многослойные пленочные структуры
- 4. 8. Сверхпроводящие свойства структур YBC0/Ce02/MF2/Mg0/Ni-W
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- Автор признателен коллективу сотрудников Института технологии поверхности Технического университета г. Брауншвейга (Германия) — О. Штаделю, Р. Ю. Муйдинову, X. Койне, Ю. Шмидту — за плодотворное сотрудничество и полезные советы.
- За помощь в экспериментальной работе автор также благодарит к.х.н. A.B. Гаршева, к.ф.-м.н. B.C. Куликаускаса, к.х.н. Г. А. Досовицкого и аспирантов ФНМ МГУ О. В. Бойцову, A.B. Маркелова, A.B. Васильева.
- Самую искреннюю благодарность за поддержку и понимание автор выражает своей жене — Инне Бледновой.