ΠΠ΅ΠΆΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½ΠΎΠ΅ Π²Π·Π°ΠΈΠΌΠΎΠ΄Π΅ΠΉΡΡΠ²ΠΈΠ΅ Π² Π΄Π²ΡΠΌΠ΅ΡΠ½ΡΡ ΡΠΈΡΡΠ΅ΠΌΠ°Ρ Ρ ΠΈΠ·ΠΎΡΠΏΠΈΠ½ΠΎΠ²ΠΎΠΉ ΡΡΠ΅ΠΏΠ΅Π½ΡΡ ΡΠ²ΠΎΠ±ΠΎΠ΄Ρ
ΠΠ°ΡΡΠΎΡΡΠ°Ρ ΡΠ°Π±ΠΎΡΠ° ΠΏΠΎΡΠ²ΡΡΠ΅Π½Π° ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΡ Π²Π·Π°ΠΈΠΌΠΎΠ΄Π΅ΠΉΡΡΠ²ΡΡΡΠΈΡ ΡΠΈΡΡΠ΅ΠΌ Ρ ΠΈΠ·ΠΎΡΠΏΠΈΠ½ΠΎΠ²ΠΎΠΉ ΡΡΠ΅ΠΏΠ΅Π½ΡΡ ΡΠ²ΠΎΠ±ΠΎΠ΄Ρ. Π‘ΠΎΠ΄Π΅ΡΠΆΠ°Π½ΠΈΠ΅ Π΄ΠΈΡΡΠ΅ΡΡΠ°ΡΠΈΠΈ ΠΎΠΏΡΠ΅Π΄Π΅Π»ΡΡΡ ΡΡΠΈ ΠΎΡΠ½ΠΎΠ²Π½ΡΡ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΡ, ΠΏΡΠΎΠ²Π΅Π΄Π΅Π½Π½ΡΠ΅ Π°Π²ΡΠΎΡΠΎΠΌ ΡΠΎΠ²ΠΌΠ΅ΡΡΠ½ΠΎ Ρ Π΄ΡΡΠ³ΠΈΠΌΠΈ ΡΠΎΡΡΡΠ΄Π½ΠΈΠΊΠ°ΠΌΠΈ ΠΠ°Π±ΠΎΡΠ°ΡΠΎΡΠΈΠΈ ΠΠ²Π°Π½ΡΠΎΠ²ΠΎΠ³ΠΎ Π’ΡΠ°Π½ΡΠΏΠΎΡΡΠ° ΠΠ€Π’Π’ Π ΠΠ Π² ΠΏΠ΅ΡΠΈΠΎΠ΄ Π΅Π³ΠΎ Π΄ΠΈΠΏΠ»ΠΎΠΌΠ½ΠΎΠΉ ΠΏΡΠ°ΠΊΡΠΈΠΊΠΈ ΠΈ ΠΎΠ±ΡΡΠ΅Π½ΠΈΡ Π² Π°ΡΠΏΠΈΡΠ°Π½ΡΡΡΠ΅: (i) ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΠ΅ ΠΏΡΠΎΠ΄ΠΎΠ»ΡΠ½ΠΎΠ³ΠΎ ΠΌΠ°Π³Π½ΠΈΡΠΎΡΠΎΠΏΡΠΎΡΠΈΠ²Π»Π΅Π½ΠΈΡ ΠΎΠ΄ΠΈΠ½ΠΎΡΠ½ΠΎΠ³ΠΎ Π³Π΅ΡΠ΅ΡΠΎΠΏΠ΅ΡΠ΅Ρ ΠΎΠ΄Π°… Π§ΠΈΡΠ°ΡΡ Π΅ΡΡ >
- Π‘ΠΎΠ΄Π΅ΡΠΆΠ°Π½ΠΈΠ΅
- ΠΡΠ΄Π΅ΡΠΆΠΊΠ°
- ΠΠΈΡΠ΅ΡΠ°ΡΡΡΠ°
- ΠΡΡΠ³ΠΈΠ΅ ΡΠ°Π±ΠΎΡΡ
- ΠΠΎΠΌΠΎΡΡ Π² Π½Π°ΠΏΠΈΡΠ°Π½ΠΈΠΈ
Π‘ΠΎΠ΄Π΅ΡΠΆΠ°Π½ΠΈΠ΅
- 1. ΠΠ±Π·ΠΎΡ Π»ΠΈΡΠ΅ΡΠ°ΡΡΡΡ
- 1. 1. ΠΠ°Π³Π½ΠΈΡΠΎΡΠΎΠΏΡΠΎΡΠΈΠ²Π»Π΅Π½ΠΈΠ΅ Π΄Π²ΡΠΌΠ΅ΡΠ½ΠΎΠΉ ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½ΠΎΠΉ ΡΠΈΡΡΠ΅ΠΌΡ Π² ΠΏΠ°ΡΠ°Π»Π»Π΅Π»ΡΠ½ΠΎΠΌ ΠΈΠ½ΡΠ΅ΡΡΠ΅ΠΉΡΡ ΠΌΠ°Π³Π½ΠΈΡΠ½ΠΎΠΌ ΠΏΠΎΠ»Π΅
- 1. 2. ΠΠ²ΡΡ ΡΠ»ΠΎΠΉΠ½Π°Ρ ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½Π°Ρ ΡΠΈΡΡΠ΅ΠΌΠ° Π² ΠΊΠ²Π°Π½ΡΡΡΡΠ΅ΠΌ ΠΌΠ°Π³Π½ΠΈΡΠ½ΠΎΠΌ ΠΏΠΎΠ»Π΅
- 1. 3. ΠΠ²ΡΠΌΠ΅ΡΠ½Π°Ρ ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½Π°Ρ ΡΠΈΡΡΠ΅ΠΌΠ° Π² ΠΈΠ½Π²Π΅ΡΡΠΈΠΎΠ½Π½ΡΡ ΡΠ»ΠΎΡΡ Π½Π° ΠΏΠΎΠ²Π΅ΡΡ Π½ΠΎΡΡΠΈ (100) ΠΊΡΠ΅ΠΌΠ½ΠΈΠ΅Π²ΡΡ ΠΠΠ-ΡΡΡΡΠΊΡΡΡ
- 2. ΠΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠ°Π»ΡΠ½Π°Ρ ΡΠ΅Ρ
Π½ΠΈΠΊΠ° ΠΈ ΠΎΠ±ΡΠ°Π·ΡΡ
- 2. 1. ΠΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠ°Π»ΡΠ½Π°Ρ ΡΡΡΠ°Π½ΠΎΠ²ΠΊΠ°
- 2. 2. Π£ΡΡΡΠΎΠΉΡΡΠ²ΠΎ ΠΎΠ±ΡΠ°Π·ΡΠΎΠ²
- 2. 3. ΠΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠ°Π»ΡΠ½ΡΠ΅ ΠΌΠ΅ΡΠΎΠ΄Ρ
- 3. Π Π΅Π·ΡΠ»ΡΡΠ°ΡΡ, ΠΏΠΎΠ»ΡΡΠ΅Π½Π½ΡΠ΅ Π² ΡΡΡΡΠΊΡΡΡΠ°Ρ
AlGaAs/GaAs
- 3. 1. 2 Π ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½Π°Ρ ΡΠΈΡΡΠ΅ΠΌΠ° Π² ΠΏΠ°ΡΠ°Π»Π»Π΅Π»ΡΠ½ΠΎΠΌ ΠΌΠ°Π³Π½ΠΈΡΠ½ΠΎΠΌ ΠΏΠΎΠ»Π΅
- 3. 2. ΠΡΠΊΡΡΡΠΈΠ΅ ΡΠ½Π΅ΡΠ³Π΅ΡΠΈΡΠ΅ΡΠΊΠΈΡ ΡΠ΅Π»Π΅ΠΉ Π² ΠΌΡΠ³ΠΊΠΎΠΉ Π΄Π²ΡΡ ΡΠ»ΠΎΠΉΠ½ΠΎΠΉ ΡΠΈΡΡΠ΅ΠΌΠ΅ Π² Π½Π°ΠΊΠ»ΠΎΠ½Π½ΡΡ ΠΌΠ°Π³Π½ΠΈΡΠ½ΡΡ ΠΏΠΎΠ»ΡΡ
- 3. 3. ΠΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠ°Π»ΡΠ½ΠΎΠ΅ Π½Π°Π±Π»ΡΠ΄Π΅Π½ΠΈΠ΅ Π½Π°ΠΊΠ»ΠΎΠ½Π½ΠΎΠΉ Π°Π½ΡΠΈΡΠ΅ΡΡΠΎΠΌΠ°Π³Π½ΠΈΡΠ½ΠΎΠΉ ΡΠ°Π·Ρ ΠΏΡΠΈ ΠΈ =
- 2. Π² Π΄Π²ΡΡ ΡΠ»ΠΎΠΉΠ½ΠΎΠΉ ΡΠΈΡΡΠ΅ΠΌΠ΅ Π² Π½Π°ΠΊΠ»ΠΎΠ½Π½Π1Ρ ΠΌΠ°Π³Π½ΠΈΡΠ½ΡΡ ΠΏΠΎΠ»ΡΡ
- 4. ΠΠ·ΠΌΠ΅ΡΠ΅Π½ΠΈΠ΅ ΡΠ½Π΅ΡΠ³Π΅ΡΠΈΡΠ΅ΡΠΊΠΈΡ
ΡΠ΅Π»Π΅ΠΉ Π² (100) ΠΊΡΠ΅ΠΌΠ½ΠΈΠ΅Π²ΠΎΠΉ ΠΠΠ-ΡΡΡΡΠΊΡΡΡΠ΅
- 4. 1. Π£ΡΠΈΠ»Π΅Π½Π½ΠΎΠ΅ Π΄ΠΎΠ»ΠΈΠ½Π½ΠΎΠ΅ ΡΠ°ΡΡΠ΅ΠΏΠ»Π΅Π½ΠΈΠ΅
- 4. 2. Π¦ΠΈΠΊΠ»ΠΎΡΡΠΎΠ½Π½Π°Ρ ΠΈ ΡΠΏΠΈΠ½ΠΎΠ²Π°Ρ ΡΠ΅Π»ΠΈ
- 5. ΠΠΎΠ΄Π΅Π»ΡΠ½ΡΠ΅ ΡΠ°ΡΡΠ΅ΡΡ
- 5. 1. Π‘ΠΏΠΈΠ½ΠΎΠ²ΡΠΉ ΡΡΡΠ΅ΠΊΡ Π² 2 Π Π³Π°Π·Π΅ Ρ Π°Π½ΠΈΠ·ΠΎΡΡΠΎΠΏΠ½ΠΎΠΉ ΡΡΡΠ΅ΠΊΡΠΈΠ²Π½ΠΎΠΉ ΠΌΠ°ΡΡΠΎΠΉ
- 5. 2. Π‘ΠΏΠ΅ΠΊΡΡ ΠΌΡΠ³ΠΊΠΎΠΉ Π΄Π²ΠΎΠΉΠ½ΠΎΠΉ ΠΊΠ²Π°Π½ΡΠΎΠ²ΠΎΠΉ ΡΠΌΡ Π² ΠΊΠ²Π°Π½ΡΡΡΡΠ΅ΠΌ ΠΏΠΎΠ»Π΅ Π² ΠΏΡΠΈΠ±Π»ΠΈΠΆΠ΅Π½ΠΈΠΈ Π΄Π²ΡΡ Π±" ΡΠΌ
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