Поверхностные процессы при формировании плотных массивов и одиночных наноструктур германия и кремния
Диссертация
Кремния размером до 10 нм и предельно высокой плотностью выше 10 см" 2, основанный на использовании оксидирования поверхности кремния, принят за основу нового проекта (начиная с ноября 2002 г.), директором которого назначен профессор Токийского университета М. Ичикава. Финансирует проект Агентство науки и технологии Японии (The Japan Science and Technology Agency). Кроме лаборатории профессора M… Читать ещё >
Содержание
- Глава 1. Экспериментальное оборудование и методы исследования
- 1. 1. Введение
- 1. 2. Приготовление подложек
- 1. 3. Основные методы исследования и параметры оборудования сверхвысоковакуумных ростовых камер
- 1. 3. 1. Отражательная электронная микроскопия
- 1. 3. 2. Сканирующая туннельная микроскопия
- 1. 3. 3. Совмещение методов СОЭМ и СТМ в камере для роста слоев
- 1. 3. 4. Оптическая генерация вторичных гармоник
- 1. 3. 5. Эллипсометрия
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